Editorial for the Special Issue on Micro and Nanosensors: Fabrication, Applications and Performance Enhancements
Author:
Affiliation:
1. Faculty of Materials Science and Ceramics, AGH University of Krakow, al. Mickiewicza 30, 30-059 Cracow, Poland
Abstract
Funder
Polish Ministry of Science and Education
Publisher
MDPI AG
Link
https://www.mdpi.com/2072-666X/15/9/1124/pdf
Reference23 articles.
1. Design, Fabrication and Application of an SOI-Based Resonant Electric Field Microsensor with Coplanar Comb-Shaped Electrodes;Yang;J. Micromech. Microeng.,2013
2. Materials Selection in Mechanical Design for Microsensors and Microactuators;Qian;Mater. Des.,2002
3. Shape Effects of Micromechanical Cantilever Sensor;Hocheng;Measurement,2012
4. SU-8 Waveguiding Interferometric Micro-Sensor for Gage Pressure Measurement;Pelletier;Sens. Actuators A Phys.,2007
5. Xiang, C., Lu, Y., Cheng, C., Wang, J., Chen, D., and Chen, J. (2021). A Resonant Pressure Microsensor with a Wide Pressure Measurement Range. Micromachines, 12.
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