Rubber-like PTFE Thin Coatings Deposited by Pulsed Electron Beam Deposition (PED) Method

Abstract

PTFE coatings were manufactured using the pulsed electron beam deposition (PED) technique and deposited on Si substrates. The deposition was carried out at constant parameters: temperature 24 °C, discharge voltages 12 kV, and 5000 electron pulses with a pulse frequency of 5 Hz. Nitrogen was used as the background gas. The gas pressure varied from 3 to 11 mTorr. The coating adhesion was evaluated using micro scratch testing and the residual scratch morphology was characterized by atomic force microscopy. Detailed studies of the chemical and physical structure were conducted using infrared spectroscopy and X-ray diffraction. These analyses were then correlated with the mechanical response of the coatings observed during the scratch tests. Drawing upon a review of the literature concerning energetic beam interactions with PTFE material, hypotheses were posed to explain why only specific conditions of the PED process yielded PTFE coatings with rubber-like properties.