Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference21 articles.
1. Solid lubricating fluorine-containing polymer film synthesized by perfluoropolyether sputtering;Sugimoto;Thin Solid Films,1988
2. Plasma treatments and plasma deposition of polymers for biomedical applications;Favia;Surf Coat Technol,1998
3. Adhesion studies of metals on fluorocarbon polymer films;Chang;J Vac Sci Technol A,1990
4. Co-deposition of titanium/polytetrafluoroethylene films by unbalanced magnetron sputtering;Liu;Surf Coat Technol,2002
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