Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors-Reference-Cited by-同舟云学术

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Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors

Published:2023-10-26 Issue: Volume: Page:
ISSN:
Container-title:ASEC 2023
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Author:

Abdul Basit¹,Shibly Mohammad Abul Hasan²^ORCID,Asary Abdul Rab³^ORCID

Affiliation:

1. Nanotechnology Research, and Application Center Istanbul Turkey, Sabanci University, Istanbul 34956, Turkey

2. Department of Textile Engineering, National Institute of Textile Engineering and Research, Dhaka 1350, Bangladesh

3. Energy Science and Engineering Department, University of Naples Parthenope, 80133 Napoli, Italy

Publisher

MDPI

Link

https://www.mdpi.com/2673-4591/56/1/105/pdf

Reference9 articles.

1. Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application;Abdul;Micro Nano Eng.,2020

2. Abdul, B., Mastronardi, V.M., Qualtieri, A., Algieri, L., Guido, F., Rizzi, F., and De Vittorio, M. (2020). Sensitivity and directivity analysis of piezoelectric ultrasonic cantilever-based mems hydrophone for underwater applications. J. Mar. Sci. Eng., 8.

3. Analysis of surface effects on mechanical properties of microcantilevers;Lu;Mater. Phys. Mech.,2001

4. Modeling of the electromechanical performance of piezoelectric laminated microactuators;Meng;J. Micromech. Microeng.,1993

5. Minimum detectable force gradients of piezoelectric microcantilever;Zhang;J. Micromech. Microeng.,1995

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