The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films

Abstract

In this paper, a wireless oxygen sensor based on a surface acoustic wave (SAW) was reported. For high-temperature applications, novel Al2O3/ZnO/Pt multilayered conductive film was deposited on langasite substrate as the electrodes, and ZnO film obtained by the pulse laser deposition (PLD) method was used as the sensitive film. The measurements of X-ray diffraction (XRD) and a scanning electron microscope (SEM) showed that the c-axis orientation of the ZnO grains and the surface morphology of the films were regulated by the deposition temperature. Meanwhile, the gas response of the sensor was strongly dependent on the surface morphology of the ZnO film. The experimental results showed that the oxygen gas sensor could operate at a high-temperature environment up to 850 °C with good stability for a long period. The max frequency shift of the sensors reaches 310 kHz, when exposed to 40% O2 gas at 850 °C. The calculated standard error of the sensors in a high-temperature measurement process is within 3%. Additionally, no significant signal degradation could be observed in the long-term experimental period. The prepared SAW oxygen gas sensor has potential applications in high-temperature sensing systems.