Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting

Abstract

Imprinting pressure is the significant factor for composite mould durability and pattern quality during UV nanoimprinting on complex surfaces. To solve these problems, the effects of imprinting pressure on the damage of flexible composite mould and pattern quality-encountering particles were investigated through experiment and simulation. It was found that increasing the pressure could improve the pattern quality, but it will damage the mould and reduce the durability. Moreover, too small pressure could lead to serious pattern defects. Therefore, the imprint pressure of 30 kPa was suitable for use in the imprinting process from the viewpoints of protecting the mould and reducing pattern defects. These findings will be useful for improving the pattern quality and mould durability.