Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/9/4/178/pdf
Reference22 articles.
1. Modeling and fabrication of single cantilever piezoelectric microgenerator with optimized Zno active layer
2. Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering
3. ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance
4. A high power ZnO thin film piezoelectric generator
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