RF Sputtering, Post-Annealing Treatment and Characterizations of ZnO (002) Thin Films on 3C-SiC (111)/Si (111) Substrates
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/8/5/148/pdf
Reference24 articles.
1. On the band structure lineup of ZnO heterostructures
2. Zinc Oxide Bulk, Thin Films and Nanostructures: Processing, Properties, and Applications;Jagadish,2005
3. Highly sensitive mass sensor using film bulk acoustic resonator
4. Structural and optical properties of ZnO films grown on the AAO templates
5. Comparison of ZnO thin films grown on a polycrystalline 3C–SiC buffer layer by RF magnetron sputtering and a sol–gel method
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