Abstract
NOR/AND flash memory was studied in neuromorphic systems to perform vector-by-matrix multiplication (VMM) by summing the current. Because the size of NOR/AND cells exceeds those of other memristor synaptic devices, we proposed a 3D AND-type stacked array to reduce the cell size. Through a tilted implantation method, the conformal sources and drains of each cell could be formed, with confirmation by a technology computer aided design (TCAD) simulation. In addition, the cell-to-cell variation due to the etch slope could be eliminated by controlling the deposition thickness of the cells. The suggested array can be beneficial in simple program/inhibit schemes given its use of Fowler–Nordheim (FN) tunneling because the drain lines and source lines are parallel. Therefore, the conductance of each synaptic device can be updated at low power level.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献