Affiliation:
1. Korea Photonics Technology Institute, Gwangju 61007, Republic of Korea
2. Optrontec, Daejeon 34113, Republic of Korea
Abstract
SiO2/Nb2O5 multilayer thin films were designed for the special application of an aviation lighting system emitting green light. For optical components in this system to meet requirements such as a high transmittance and durability, SiO2/Nb2O5 multilayer thin films of 60 individual layers were fabricated by a plasma-assisted reactive magnetron sputtering method. As a result, the transmittance spectra were confirmed to have a flat top surface and a square bandwidth. The transmittances of the SiO2/Nb2O5 multilayer thin films in the range of 500 nm to 550 nm was approximately 96.14%. The reason for high transmittance was attributed to the almost matching between the designed and fabricated SiO2/Nb2O5 multilayer thin films. It was found that there was little difference in the total thickness between the designed and fabricated SiO2/Nb2O5 multilayer thin films without interlayer diffusion. The surface roughness and hardness of the SiO2/Nb2O5 multilayer thin films on a glass substrate was 2.32 nm ± 0.19 nm and 6.6 GPa, respectively. These results indicate that SiO2/Nb2O5 multilayer thin films can be applied not only to the optical filters used in aviation lighting devices, but also to various optics applications because of high transmittance.
Funder
Materials and Components Technology Development Program of MOTIE/KEIT
Industrial Infrastructure Program for Smart Specialization of MOTIE/KIAT
Nano and Material Technology Development Program through the National Research Foundation of Korea (NRF), funded by the Ministry of Science and ICT
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
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