Author:
Nicolay Pascal,Lenzhofer Martin
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference19 articles.
1. A micro-Pirani vacuum gauge based on micro-hotplate technology;Zhang;Sens. Actuators A Phys.,2006
2. Microstructured vacuum gauges and their future perspectives;Völklein;Vacuum,2008
3. Miniature and MEMS-type vacuum sensors and pumps;Górecka-Drzazga;Vacuum,2009
4. Datasheet Series 905 MicroPirani™–Sensor Kithttp://www.mksinst.com/docs/UR/905DS.pdf
5. Datasheet HVS Series MEMS Type Pirani Vacuum Sensorhttp://www.heimannsensor.com/HVS_Vac_03_04_Rev8.pdf
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