Opto-Microfluidic Fabry-Perot Sensor with Extended Air Cavity and Enhanced Pressure Sensitivity

Abstract

An opto-microfluidic static pressure sensor based on a fiber Fabry-Perot Interferometer (FPI) with extended air cavity for enhancing the measuring sensitivity is proposed. The FPI is constructed in a microfluidic channel by the combination of the fixed fiber-end reflection and floating liquid surface reflection faces. A change of the aquatic pressure will cause a drift of the liquid surface and the pressure can be measured by detecting the shift of the FPI spectrum. Sensitivity of the sensor structure can be enhanced significantly by extending the air region of the FPI. The structure is manufactured by using a common single-mode optical fiber, and a silica capillary with the inner wall coated with a hydrophobic film. A sample with 3500 μm air cavity length has demonstrated the pressure sensitivity of about 32.4 μm/kPa, and the temperature cross-sensitivity of about 0.33 kPa/K.