A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift-Reference-Cited by-同舟云学术

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A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift

Published:2017-01-18 Issue:12 Volume:17 Page:178
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Li Bo,Zhao Yulong,Li Cun,Cheng Rongjun,Sun Dengqiang,Wang Songli

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/17/1/178/pdf

Reference33 articles.

1. A review of low cost accelerometers for vehicle dynamics

2. Piezoresistive sensing with twin-beam structures in standard MEMS foundry processes

3. Micromachined inertial sensors

4. A micromachined piezoresistive accelerometer with high sensitivity: design and modelling

5. Design and fabrication of a new miniaturized capacitive accelerometer

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1. Temperature Compensation for MEMS Accelerometer Based on a Fusion Algorithm;Micromachines;2024-06-27

2. Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures;Micromachines;2024-06-14

3. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

4. High-sensitivity fiber optic graphene resonant accelerometer;Optics Letters;2024-03-25

5. An All-Quartz Integrated Resonant Accelerometer With High Sensitivity and Stability: Design, Fabrication, and Measurement;IEEE Sensors Journal;2024-03-01

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