Piezoresistive sensing with twin-beam structures in standard MEMS foundry processes-Reference-Cited by-同舟云学术

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Piezoresistive sensing with twin-beam structures in standard MEMS foundry processes

Published:2006-03 Issue:2 Volume:127 Page:325-331
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bahreyni Behraad,Najafi Farshid,Shafai Cyrus

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Microsystem Design;Senturia,2000

2. Micromachined Transducer Sourcebook;Kovacs,1998

3. Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes;Bao,2000

4. MEMSCAP Inc., 4021 Stirrup Creek Drive, Suite 120, Durham, NC 27703, USA, http://www.memscap.com (online).

5. http://www.sandia.gov (online).

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