Energy Efficiency Enhancement of Inductively Coupled Plasma Torch: Computational Study

Abstract

In this research, we studied the performance analysis of inductively coupled radiofrequency plasma “RF-ICP” torch used in multi-material processing. A 2D numerical model built with COMSOL Multiphysics was used to study the discharge behavior and evaluate the overall efficiency transmitted into the plasma system. The temperature and velocity flow of the plasma were investigated. The numerical results are consistent with previous experimental studies. The temperature and velocity profiles are represented under a wide range of RF power and for different sheath gas flow rates. With increasing power, the radial peak temperature typically shifts towards the wall. The resistance of the torch rises whereas the inductance diminishes with increasing RF power. The overall dependency of the coupling efficiency to the RF power is also estimated. The stabilization of the plasma flow dependency to the sheath swirl flow was investigated. The incorporation of Helium (0.02%) into an Argon gas was established to minimize the energy lost in the sidewall. The number and spacing of induction coil numbers affects the temperature and flow field distribution. A valuable approach to designing and optimizing the induction plasma system is presented in the proposed study. The obtained results are fundamental to specify ICP torch design criteria needed for multi-material processing.