Numerical investigation of characteristics and excitation effects on discharge properties in an inductively coupled plasma torch-Reference-Cited by-同舟云学术

Numerical investigation of characteristics and excitation effects on discharge properties in an inductively coupled plasma torch

Published:2023-04-01 Issue:4 Volume:13 Page:
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:

Author:

Bouherine Keltoum¹^ORCID,Leroy Olivier²

Affiliation:

1. Laboratoire d’électrotechnique de Constantine (LEC), Université de Constantine 1 , Constantine 25000, Algeria

2. Laboratoire de Physique des Gaz et des Plasmas L.P.G.P, Université Paris Saclay 2 , 91405 Orsay, France

Abstract

This paper focuses on an atmospheric-pressure inductively coupled plasma (ICP) torch sustained by an argon discharge. A two-dimensional axisymmetric model is developed for the numerical simulation of the device. Maxwell equations and fluid equations were solved as the governing equations using the COMSOL Multiphysics software. The result presents the electromagnetic fields generated by the ICP, plasma parameters (electron density and temperature), and gas characteristics (gas flow and gas temperature). The study of the effects of excitation parameters (coil current, coil geometry, and coil turns) on plasma characteristics is analyzed.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://pubs.aip.org/aip/adv/article-pdf/doi/10.1063/5.0139959/16819321/045015_1_5.0139959.pdf

Reference21 articles.

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2. Flow and temperature fields in the fire-ball of an inductively coupled plasma;IEEE Trans. Plasma Sci.,1976

3. A two-temperature model of the inductively coupled rf plasma;J. Appl. Phys.,1987

4. Power dissipation of an inductively coupled plasma torch under E mode dominated regime;Micromachines,2021