1. Center of Nanotechnology, Alferov University, Khlopina 8/3, 194021 St. Petersburg, Russia
2. Higher School of Engineering Physics, Peter the Great St. Petersburg Polytechnic University, Polytechnicheskaya 29, 195251 St. Petersburg, Russia
3. N.N. Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, Kosygin Street 4, 119991 Moscow, Russia
4. Moscow Institute of Physics and Technology, Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, 9 Institutskiy Lane, 141701 Dolgoprudny, Russia
5. School Department of Physics and Engineering, ITMO University, Lomonosova 9, 197101 St. Petersburg, Russia
6. Qingdao Innovation and Development Center, Harbin Engineering University, Qingdao 266000, China