1. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2. School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
3. Institute of Microelectronics of Tianjin, Tianjin 300451, China
4. Beijing Zhongke New Micro Technology Development Co., Ltd., Beijing 100029, China
5. Faculty of Radioengineering and Electronics, Belarusian State University of Informatics and Radioelectroics, 220013 Minsk, Belarus
6. School of Electrical and Information Engineering, Hubei University of Automotive Technology, Shiyan 442002, China