Review of Element Analysis of Industrial Materials by In-Line Laser—Induced Breakdown Spectroscopy (LIBS)

Abstract

Laser-induced breakdown spectroscopy (LIBS) is a rapidly developing technique for chemical materials analysis. LIBS is applied for fundamental investigations, e.g., the laser plasma matter interaction, for element, molecule, and isotope analysis, and for various technical applications, e.g., minimal destructive materials inspection, the monitoring of production processes, and remote analysis of materials in hostile environment. In this review, we focus on the element analysis of industrial materials and the in-line chemical sensing in industrial production. After a brief introduction we discuss the optical emission of chemical elements in laser-induced plasma and the capability of LIBS for multi-element detection. An overview of the various classes of industrial materials analyzed by LIBS is given. This includes so-called Technology materials that are essential for the functionality of modern high-tech devices (smartphones, computers, cars, etc.). The LIBS technique enables unique applications for rapid element analysis under harsh conditions where other techniques are not available. We present several examples of LIBS-based sensors that are applied in-line and at-line of industrial production processes.