1. School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China
2. Fujian Provincial Key Laboratory of Terahertz Functional Devices and Intelligent Sensing, School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou 350108, China
3. Fujian Institute of Metrology, Fuzhou 350003, China
4. Fujian Key Laboratory of Force Measurement, Fuzhou 350100, China
5. Key Laboratory of Force Measurement for State Market Regulation, Fuzhou 350100, China