Bifurcation Control of an Electrostatically-Actuated MEMS Actuator with Time-Delay Feedback-Reference-Cited by-同舟云学术

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Bifurcation Control of an Electrostatically-Actuated MEMS Actuator with Time-Delay Feedback

Published:2016-10-01 Issue:10 Volume:7 Page:177
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Li Lei,Zhang Qichang,Wang Wei,Han Jianxin

Funder

National Natural Science Foundation of China

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

http://www.mdpi.com/2072-666X/7/10/177/pdf

Reference37 articles.

1. A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure

2. Design and performance analysis of a nanogyroscope based on electrostatic actuation and capacitive sensing

3. Analysis of Dynamic Performance of a Kalman Filter for Combining Multiple MEMS Gyroscopes

4. On using the dynamic snap-through motion of MEMS initially curved microbeams for filtering applications

5. Linear and Nonlinear Tuning of Parametrically Excited MEMS Oscillators

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dynamic Analysis of a Micro Beam-Based Tactile Sensor Actuated by Fringing Electrostatic Fields;Micromachines;2019-05-14

2. Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration;Micromachines;2019-05-10

3. Fractional order PID based optimal control for fractionally damped nonlocal nanobeam via genetic algorithm;Microsystem Technologies;2019-03-19

4. Vibration Identification of Folded-MEMS Comb Drive Resonators;Micromachines;2018-08-01

5. Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect;International Journal of Non-Linear Mechanics;2017-04

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