1. Center of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, China
2. Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin 150080, China
3. State Key Laboratory of Robotics and System, Harbin Institute of Technology, No. 92, Xidazhi Street, Nangang District, Harbin 150001, China