1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China
2. Center of Ultra-Precision Optoelectronic Instrumentation Engineering, Harbin Institute of Technology, Harbin 150001, China
3. Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry Information Technology, Harbin 150080, China
4. College of Mechanical and Electrical Engineering, Harbin Engineering University, Harbin 150001, China