Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

Abstract

In this study, a piezoelectric micromachined ultrasonic transducer (PMUT) is integrated with a microliter-sized volume-tunable Helmholtz resonator. The passive Helmholtz resonator is constructed using an SU8 photolithography-defined square opening plate as the neck portion, a 3D-printed hollow structure with a threaded insert nut, and a precision set screw to form the volume-controllable cavity of the Helmholtz resonator. The fabricated piezoelectric films acted as ultrasonic actuators attached to the surface of the neck SU8 plate. Experimental results show that the sound pressure level (SPL) and operation bandwidth could be effectively tuned, and a 200% SPL increase and twofold bandwidth enhancement are achieved when setting the cavity length to 0.75 mm compared with the open-cavity case. A modified Helmholtz resonator model is proposed to explain the experimental results. The adjusting factors of the effective mass and viscous damper are created to modify the existing parameters in the conventional Helmholtz resonator model. The relationship between the adjusting factors and cavity length can be described well using a two-term power series curve. This modified Helmholtz resonator model not only provides insight into this active-type Helmholtz resonator operation but also provides a useful estimation for its optimal design and fabrication.