A Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films
Author:
Funder
Natural Science Foundation of China
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/8/4/116/pdf
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