1. School of Materials Science and Engineering, Xiangtan University, Xiangtan 411105, China
2. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
3. College of Physics and Optoelectronic Engineering, Ludong University, Yantai 264025, China
4. School for Optoelectronic Engineering, Zaozhuang University, Zaozhuang 277160, China