A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders

Author:

Szermer MichałORCID,Zając Piotr,Amrozik Piotr,Maj Cezary,Jankowski Mariusz,Jabłoński GrzegorzORCID,Kiełbik Rafał,Nazdrowicz Jacek,Napieralska Małgorzata,Sakowicz Bartosz

Abstract

The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor.

Funder

Narodowe Centrum Badań i Rozwoju

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference37 articles.

1. A New Technique on Vibration Optimization of Industrial Inclinometer for MEMS Accelerometer Without Sensor Fusion

2. MEMS Inertial Sensors;Fitzgerald,2021

3. MEMS Accelerometers;Rasras,2019

4. MEMS Tornado to Challenge Next Generation Packaging;Bryzek,2012

5. MEMS 3D DR/GPS Integrated System for Land Vehicle Application Robust to GPS Outages

Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3