Slow Mode-Based Control Method for Multi-point Temperature Control System

Abstract

In recent years, thermal processing systems with integrated temperature control have been increasingly needed to achieve high quality and high performance. In this paper, responding to the growing demands for proper transient response and to provide more accurate temperature controls, a novel slow-mode-based control (SMBC) method is proposed for multi-point temperature control systems. In the proposed method, the temperature differences and the transient response of all points can be controlled and improved by making the output of the fast modes follow that of the slow mode. Both simulations and experiments were carried out, and the results were compared to conventional control methods in order to verify the effectiveness of the proposed method.