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High-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity

  • Published:2011-01-31 Issue:2 Volume:11 Page:1819-1846
  • ISSN:1424-8220
  • Container-title:Sensors
  • language:en
  • Short-container-title:Sensors

Author:

Mohammed Ahmed,Moussa Walied,Lou Edmond

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference45 articles.

1. Mechanical snsors;Kloeck,1994

2. Micromachined Transducers: Sourcebook;Kovacs,1998

3. Semiconductor Sensors;Sze,1994

4. Simple Sensing Head Geometry Using Fiber Bragg Gratings For Strain-Temperature Discrimination;Frazão;Opt. Commun,2007

5. The Internal Strain of Three-Dimensional Braided Composites with Co-Braided FBG Sensors;Li;Opt. Lasers Eng,2007

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