Abstract
Abstract
In this paper, a first-order average temperature coefficient of resistance (
TC
R
ave
) calculation model is established and analyzed based on the distribution of piezoresistive doping concentration in bulk silicon. Furthermore, by extracting the experimental results of the first-order
TC
R
ave
of multiple research groups and combining the first-order
TCR
ave
calculation model, the new mobility model in the concentration range of piezoresistance (1 × 1018–1 × 1020 at cm−3) is obtained by fitting. The first-order
TC
R
ave
of five implantation concentrations under the same process is tested. The results show that the error between the first-order
TC
R
ave
obtained based on the new mobility calculation model and the test results is within 5%. However, the first-order
TC
R
ave
based on the Arora mobility model has a deviation of 104.6% under the implantation condition of 3.75 × 1015 at cm−2. At the same time, the effects of different annealing temperatures and time on the first-order
TC
R
ave
at the implantation concentration of 8.5 × 1013 at cm−2 are compared. The results show that a higher annealing temperature or longer annealing time is not conducive to reducing the first-order
TC
R
ave
, but the difference is small.
Funder
National Key R&D Program of China
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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