1. Beeby, S., Ensel, G., White, N.M., and Kraft, M. (2004). MEMS Mechanical Sensors, Artech House.
2. Micromachined pressure sensors: Review and recent developments;Eaton;J. Cit. Rep.,1997
3. Various applications of resonant pressure sensor chip based on 3-D micromachining;Harada;Sens. Actuators A Phys.,1999
4. Lin, L., and Yun, W. (1998, January 28). MEMS pressure sensors for aerospace applications. Proceedings of the IEEE Aerospace Conference, Aspen, CO, USA.
5. Martin, W. (2019, January 4). Vacuum pressure measurement in semiconductor industry. Proceedings of the 14th International Conference on Vacuum Science and Engineering Application, Shenyang, China.