On the Importance of Combined Scratch/Acoustic Emission Test Evaluation: SiC and SiCN Thin Films Case Study
Author:
Funder
Univerzita Palackého v Olomouci
Publisher
MDPI AG
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces
Link
http://www.mdpi.com/2079-6412/8/5/196/pdf
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1. Deposition and microstructure of PVD TiNNbN multilayered coatings by combined reactive electron beam evaporation and DC sputtering
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4. LPCVD silicon carbide and silicon carbonitride films using liquid single precursors
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