Online Characterization Algorithms for Optical Coating Production with Broadband Monitoring
Author:
Tikhonravov Alexander,
Kochikov Igor,
Isaev Temur,
Lukyanenko Dmitry,
Yagola AnatolyORCID
Abstract
Algorithms for the online determination of thicknesses of already-deposited layers are important for the reliable control of optical coating production. Possible ways of constructing such algorithms in the case of coating production with direct broadband monitoring are discussed. A modified triangular algorithm is proposed. In contrast to the well-known triangular algorithm, the new algorithm does not determine all thicknesses of previously deposited layers but only those for which an increase in the accuracy of their determination is to be expected. The most promising algorithms are compared in terms of their accuracy and operational speed. It is shown that the modified triangular algorithm is much faster than the triangular algorithm, and both algorithms have close accuracy. The operational speed of the modified triangular algorithm can be a decisive factor for its use in modern broadband monitoring systems.
Funder
Russian Science Foundation
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces
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