Advances in direct optical monitoring using a wideband spectrometer and a new thin film optical monitoring software
Author:
Arhilger D.,Hagedorn H.,Jäger M.,Zöller A.
Abstract
A new thin film optical monitoring software (TOMS) has been developed, supporting the in-situ direct optical monitoring and process simulation with various thickness control strategies. We discuss the functionalities and present various coating results.
Publisher
Optica Publishing Group
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