Surface Hardening of Machine Parts Using Nitriding and TiN Coating Deposition in Glow Discharge

Abstract

Surface hardening of machine parts substantially improves their performance. The best results are obtained when combined hardening consists of surface nitriding and subsequent deposition of hard coatings. The nitriding of machine parts immersed in the plasma of glow coatings have been studied, and the study results are presented. Titanium atoms for coating synthesis are obtained via titanium evaporation in a hollow molybdenum anode of the discharge. Stable evaporation of titanium occurs only when the power density of electrons heating the liquid titanium does not exceed ~500 W/cm2. To start evaporation, it is only necessary to reduce the gas pressure to 0.02 Pa. To stop evaporation, it is enough to increase the gas pressure to 0.1 Pa. Fast argon and nitrogen atoms used for cleaning the machine parts, heating them, and bombarding the growing coating are obtained using a grid composed of plane-parallel plates under high negative voltage and immersed in plasma.