Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/7/12/237/pdf
Reference31 articles.
1. Fabrication and packaging of inertia micro-switch using low-temperature photo-resist molded metal-electroplating technology
2. Evaluation of the threshold trimming method for micro inertial fluidic switch based on electrowetting technology
3. Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity
4. A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time
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1. Correlated Theory of Cross-Axis Interference of MEMS Devices Based on Parallel Plate and Squeeze Film Air Damping Induced Suppression;IEEE Sensors Journal;2022-04-01
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