Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity-Reference-Cited by-同舟云学术

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Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity

Published:2016-04-13 Issue:5 Volume:26 Page:055008
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zhang Qihuan,Yang Zhuoqing,Xu Qiu,Wang Yang,Ding Guifu,Zhao Xiaolin

Funder

Hi-Tech Research and Development Program of China

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/26/i=5/a=055008/pdf

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