Lightweight Inertial Switch with Spiral Separation Mechanism for Extending Contact Time-Reference-Cited by-同舟云学术

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Lightweight Inertial Switch with Spiral Separation Mechanism for Extending Contact Time

Published:2024-01-21 Issue: Volume: Page:733-736
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Zhang Mingyu¹,Yin Tan¹,Hu Zhiyuan¹,Wang Mengcheng¹,Huang Haokai¹,Zhang Yanxin¹,Hao Yongcun²,Chang Honglong²,Wang Yan¹,Sun Yunna¹,Yang Zhuoqing¹,Ding Guifu¹

Affiliation:

1. Shanghai Jiao Tong University,National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Shanghai,China,200240

2. Northwestern Polytechnical University (NPU),The Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace,Xi’an,China,710072

Funder

National Key Research and Development Program of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439378.pdf?arnumber=10439378

Reference7 articles.

1. Multi-Threshold Inertial Switch for Quantitative Acceleration Measurements

2. Simulation, fabrication and characterization of an all-metal contact-enhanced triaxial inertial microswitch with low axial disturbance

3. Research Progress of MEMS Inertial Switches

4. Heterogeneous Integrated MEMS Inertial Switch with Electrostatic Locking and Compliant Cantilever Stationary Electrode for Holding Stable ‘on’-State

5. Multi-Threshold Inertial Switch With Acceleration Direction Detection Capability

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