Affiliation:
1. Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
2. Institute of Quantum Systems (IQS), Chungnam National University, Daejeon 34134, Republic of Korea
Abstract
Despite over 90 years of study on the emissive probe, a plasma diagnostic tool used to measure plasma potential, its underlying physics has yet to be fully understood. In this study, we investigated the voltages along the hot filament wire and emitting thermal electrons and proved which voltage reflects the plasma potential. Using a circuit model incorporating the floating condition, we found that the lowest potential on the plasma-exposed filament provides a close approximation of the plasma potential. This theoretical result was verified with a comparison of emissive probe measurements and Langmuir probe measurements in inductively coupled plasma. This work provides a significant contribution to the accurate measurement of plasma potential using the emissive probe with the floating potential method.
Funder
National Research Council of Science & Technology (NST) grant funded by the Korean government
Next-Generation Intelligence Semiconductor R&D Program through Korea Evaluation Institute of Industrial Technology (KEIT) funded by the Korean government
Korea Institute of Energy Technology Evaluation and Planning (KETEP) and MOTIE of the Republic of Korea
MOTIE
KSRC
Korea Institute for Advancement of Technology (KIAT) grant funded by the Korean government
Basic Science Research Program through National Research Foundation of Korea (NRF) funded by the Ministry of Education
KIMM Institutional Program (NK236F) and NST/KIMM
“Regional Innovation Strategy (RIS)” through National Research Foundation of Korea (NRF) funded by the Ministry of Education
Subject
General Materials Science
Cited by
1 articles.
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