Abstract
A new three-axis inertial switch is proposed. The triangle-structured movable electrode is designed to improve the inertial switch’s dynamic response performance, especially the movable electrode’s dynamic stability performance. The static mechanical analysis indicated that the displacement of the movable electrode to the fixed electrode in the sensitive direction is the minimum when the acceleration is applied to this designed inertial switch. The dynamic simulation analysis showed that the threshold of the designed inertial is about 235 g. The threshold in the non-sensitive direction is about 240 g, 270 g, 300 g, and 350 g when the directions of applied acceleration deviate 15°, 30°, 45°, and 60° from the sensitive direction, respectively. These results indicated that the designed inertial could resist the impact in non-sensitive directions and improve the stability in sensitive directions. The prototype of the inertial switch was fabricated and tested successfully. The testing results indicate that the threshold of the fabricated inertial switch is about 219 g. The test results verify the dynamic stability performance of the designed inertial switch.
Funder
Joint Funds of the National Natural Science Foundation of China
key Fund for Basic research of Local Colleges in Yunnan Province
Joint Foundation of Yunnan Local Universities
Guangxi science and technology base and talent project
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Reference16 articles.
1. A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Ap plication;Ren;J. Microelectromech. Syst. Jt. IEEE ASME Publ. Microstruct. Microactuators Microsens. Microsyst.,2021
2. Multi-Threshold Inertial Switch with Acceleration Direction Detection Capability;Xu;IEEE Trans. Ind. Electron.,2022
3. Design, Modeling, and Testing of a Bidirectional Multi-Threshold MEMS Inertial Switch;Niyazi;Sens. Actuators A Phys.,2022
4. Development and calibration of a stochastic dynamics model for the design of a MEMS inertial switch;Field;Sens. Actuators A Phys.,2007
5. Micromachined threshold inertial switches: A review;Xu;J. Micromech. Microeng.,2022
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献