A Study on the Deformation Behavior of a Microstructure Depending on Its Shape and the Cutting Section in the Precision Cutting of a Functional Part

Abstract

The shape accuracy of microstructures is an important factor that directly affects the quality and performance of products. Nevertheless, it is difficult to find a study for the shape accuracy of microstructures below several microns. This study aimed to reduce the shape error in the precision machining of microstructures with a repeated triangular cross-sectional shape with a width of 5 µm or less. Two important factors in this study were the morphological features of the microstructure to be fabricated and the cross-sectional shape of the chip. The tool path was modified in consideration of these two factors. Before the tool path change, the shape error due to the deformation of the triangular micropattern in a DOC (depth of a cut) of 1 µm was about 0.39 µm. However, after the tool path was modified, the shape error due to deformation did not occur while maintaining the DOC at 1 µm.