Fabrication of periodic nanostructures by single-point diamond turning with focused ion beam built tool tips

Author:

Sun J,Luo X,Chang W,Ritchie J M,Chien J,Lee A

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 42 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. MC design and FIB preparation of a YSZ biochemical material microstructure;Journal of the Mechanical Behavior of Biomedical Materials;2023-11

2. Thermal Nanoimprint Lithography—A Review of the Process, Mold Fabrication, and Material;Nanomaterials;2023-07-08

3. Fabrication of periodic nanostructure using a multi-tip diamond tool: depth prediction and material removal mechanism;The International Journal of Advanced Manufacturing Technology;2022-11-14

4. Fabrication of sinusoidal-shaped multi-tip diamond tools by a focused ion beam machining process;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2022-08-31

5. Generation mechanism of surface micro-texture in axial ultrasonic vibration-assisted milling (AUVAM);The International Journal of Advanced Manufacturing Technology;2022-08-24

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