Fabrication and Characterization of a Flexible Fluxgate Sensor with Pad-Printed Solenoid Coils

Abstract

This paper presents the fabrication and characterization of a flexible, flat, miniaturized fluxgate sensor with a thin amorphous rectangular magnetic core fabricated by the pad/printing technique. Both the design and the various printing steps of the sensor are presented. The fluxgate sensor comprises of solenoid coils, and to the best of our knowledge, is the first to be printed with a conventional micro-printing technique. The magnetic core is a non-printed component, placed between the printed layers. The sensor’s linear measuring range is ±40 µT with 2% full-scale linearity error, at 100 kHz excitation frequency. The highest measured sensitivity reaches 14,620 V/T at 200 kHz, while the noise of the sensor was found to be 10 nT/ Hz at 1 Hz.