Giant Magneto-Impedance Effect Microcurrent Sensor Based on MEMS Technology

Abstract

Abstract The performances of common magnetic sensors in the field of microcurrent detection are presented. The giant magneto-impedance (GMI) effect is summarized, and the possibility of picoampere microcurrent measurement using the GMI effect sensor is proved. The classical design scheme of the GMI effect current sensor is improved, and a GMI sensor chip model that can realize picoampere microcurrent measurement is preliminarily established, which lays a theoretical foundation for further development of GMI microcurrent sensor with high performance, small volume, and low cost.