1. Federal State Budgetary Scientific Institution “Federal Scientific Agroengineering Center VIM”, 1st Institutsky Proezd 5, 109428 Moscow, Russia
2. Prokhorov General Physics Institute of the Russian Academy of Sciences, Vavilova Str. 38, 119991 Moscow, Russia
3. Laser Physics Department, National Research Nuclear University MEPhI, Kashirskoe sh. 31, 115409 Moscow, Russia