A 1 × 2 Two-Dimensional Slanted Grating Based on Double-Layer Cylindrical Structure

Author:

Chen Yuda1,Wang Jin1,Wang Yihan1,Li Xingxue1,Jin Ge1,Zhou Changhe1

Affiliation:

1. Institute of Photonics Technology, Jinan University, Guangzhou 510000, China

Abstract

Diffraction gratings play an increasingly important role in various planar optical systems, such as near-eye display systems for virtual reality (VR) and augmented reality (AR). The slanted gratings have more advantages than other elements. A 1 × 2 transmission two-dimensional (2D) slanted grating based on a double-layer cylindrical structure was proposed in this paper. In the initial phase of this study, this kind of grating was proposed and designed. We used rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm (SA) to optimize the grating parameters. The effects of the grating geometric parameters on the diffraction efficiency were investigated using rigorous coupled-wave analysis (RCWA). The simulated annealing algorithm (SA) optimization results show that the diffraction efficiency of the (0, −1) and (−1, 0) order exceed 35% under normal incidence in the range of 429–468 nm wavelength for TE and TM polarization. Meanwhile, the total diffraction efficiency can reach up to 78%. In the last section, we discuss the tolerances for the grating parameters to ensure high quality manufacturing processes. The total effective efficiency is greater than 75% when the MgF2 thickness is from 300 nm to 350 nm and the SiO2 thickness is from 525 nm to 550 nm. Moreover, the grating period has a 53 nm fabrication tolerance, and the slanted angle has a 8.8-degree fabrication tolerance. The relatively large tolerances ensure that it is easy to fabricate the two-dimensional slanted grating and to achieve the targeted objectives. The proposed 2D slanted grating can be applied to 2D exit pupil expansion, which is of great importance in AR/VR applications.

Funder

Guangdong Provincial Pearl River Talents Program

Guangzhou Science and Technology Program Key Projects

National Natural Science Foundation of China

Publisher

MDPI AG

Subject

Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science

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