1. Yizhe, L. (2021, January 15–17). Advantages of CMOS Technology in Very Large Scale Integrated Circuits. Proceedings of the 2021 2nd International Conference on Artificial Intelligence in Electronics Engineering (AIEE 2021), Phuket, Thailand.
2. EETimes (2013, August 11). MEMS Market to Top $22 Billion by 2018. Available online: https://www.eetimes.com/mems-market-to-top-22-billion-by-2018/.
3. Technologies for cofabricating MEMS and electronics;Fedder;Proc. IEEE,2008
4. Baltes, H., Paul, O., Korvink, J.G., Schneider, M., Buhler, J., Schneeberger, N., Jaeggi, D., Malcovati, P., Hornung, M., and Hiberli, A. (1996, January 8–11). IC MEMS microtransducers. Proceedings of the IEEE International Electron Devices Meeting, San Francisco, CA, USA.
5. Microsensor integration into systems-on-chip;Brand;Proc. IEEE,2006