Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS

Author:

Krayden Adir1,Shlenkevitch Dima2,Blank Tanya1,Stolyarova Sara1,Nemirovsky Yael1

Affiliation:

1. Electrical and Computer Engineering Department, Technion—Israel Institute of Technology, Haifa 3200003, Israel

2. Todos Technologies, Kinneret 12 Street, Airport City 7019900, Israel

Abstract

The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechanical system (CMOS-SOI-MEMS) technologies, and the result is a new pellistor-like sensor, dubbed GMOS, with integrated signal processing. In this study, we describe the performance of such sensors for the selective detection of mixtures of gases. The novel key ideas of this study are: (i) the use of the GMOS for gas sensing; (ii) applying the Kalman filter to improve the signal-to-noise ratio; (iii) adding artificial intelligence (AI) with tiny edge approach.

Funder

TODOS Technologies

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

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