Investigation of Submerged MEMS Ultrasonic Sensors for Underwater Obstacle Avoidance Application

Author:

Wang Zhihao1,Zhang Wendong1ORCID,Wang Renxin1,He Changde1ORCID,Liu Shurui1,Wang Jingwen1,Li Zhaodong1,Lu Xiaoxing1,Qin Yun1,Zhang Guojun1,Cui Jiangong1ORCID,Yang Yuhua1,Jia Licheng1

Affiliation:

1. State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China

Abstract

Ultrasound is a powerful and versatile technology that has been applied extensively in medicine and scientific research. The development of miniature underwater robots focuses on achieving specific tasks, such as surveys and inspections in confined spaces. However, traditional sonar has limited use in micro underwater robots due to its large size and heavy power demands. Conversely, capacitive micromechanical ultrasonic transducers (CMUTs) offer various advantages, including a wide bandwidth, compact size, and integration feasibility. These attributes make CMUTs a candidate for obstacle avoidance in micro underwater robots. Hence, a novel CMUT structure using Si-Si bonding is proposed. In this design, a membrane isolation layer replaces the cavity bottom isolation layer, simplifying the process and improving bond reliability. A finite element model of the CMUT was constructed in COMSOL and numerically assessed for the CMUT’s operating frequency, collapse voltage, and submerged depth. The CMUT, manufactured using micro-electro-mechanical system (MEMS) technology, undergoes waterproofing with PDMS—A material with similar acoustic impedance to water and corrosion resistance. Underwater tests reveal the CMUT’s resonant frequency in water as approximately 2 MHz, with a −3 dB bandwidth of 108.7%, a transmit/receive beam width of 7.3°, and a standard deviation of measured distance from the true distance of less than 0.05. These outcomes suggest that CMUTs hold promise in obstacle avoidance applications for fish-shaped underwater robots.

Funder

National Natural Science Foundation of China

National Key Research and Development Program

Fundamental Research Program of Shanxi Province

Shanxi “1331 Project” Key Subject Construction

Publisher

MDPI AG

Subject

General Earth and Planetary Sciences

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