Ultra Thin Poly-Si Nanosheet Junctionless Field-Effect Transistor with Nickel Silicide Contact
Author:
Publisher
MDPI AG
Subject
General Materials Science
Link
http://www.mdpi.com/1996-1944/10/11/1276/pdf
Reference18 articles.
1. Influence of the nature of the Si substrate on nickel silicide formed from thin Ni films
2. NiSi salicide technology for scaled CMOS
3. Ni- and Co-based silicides for advanced CMOS applications
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